Coherent LiDAR with 2D quasi-static MEMS mirror scanning

Sarah Cwalina; Norman Laske; Shanshan Gu-Stoppel; Christoph Kottke; Volker Jungnickel; Ronald Freund

doi:10.1117/12.2647499

15 March 2023 Coherent LiDAR with 2D quasi-static MEMS mirror scanning

Sarah Cwalina, Norman Laske, Shanshan Gu-Stoppel, Christoph Kottke, Volker Jungnickel, Ronald Freund

Proceedings Volume 12434, MOEMS and Miniaturized Systems XXII; 124340K (2023) https://doi.org/10.1117/12.2647499
Event: SPIE OPTO, 2023, San Francisco, California, United States

Abstract

Coherent LiDAR concepts for automotive or unmanned aerial vehicle (UAV) applications are of increasing interest due to their superior performance compared to standard pulse-based systems, especially at longer range. Proposed scanning methods include bulky and slow galvanometer- or polygon scanners that are often impractical for implementation in cars or UAVs. Here, micro-electro-mechanical-system (MEMS) mirrors can be used as an alternative compact scanning device. To merge the advantages of coherent LiDAR technology with the advantages of miniaturized scanning by MEMS mirrors, we present fiber-based frequency modulated continuous wave (FMCW) LiDAR point cloud generation using quasi-static MEMS mirrors. The unique feature of quasi-static MEMS mirrors is their ability to perform a point-to-point scanning and measurement process, while most conventional MEMS mirrors scan the scene continuously. Hence, they enable a compact monostatic system design. We demonstrate the operation of such a system for the first time, to the best of our knowledge. Here, we show the operating principle and design of those quasi-static MEMS mirrors. We also implement and test the generation of the mirror scan pattern using a digital IIR (infinite impulse response) filter method. Lastly, we show the LiDAR point cloud generation in an indoor environment and evaluate the point cloud output for different MEMS mirror sizes, angular resolutions, and ranges.

Conference Presentation

Citation Download Citation

Sarah Cwalina, Norman Laske, Shanshan Gu-Stoppel, Christoph Kottke, Volker Jungnickel, and Ronald Freund "Coherent LiDAR with 2D quasi-static MEMS mirror scanning", Proc. SPIE 12434, MOEMS and Miniaturized Systems XXII, 124340K (15 March 2023); https://doi.org/10.1117/12.2647499

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